The HiPIMS + MF application superimpose a HiPIMS pulse with a synchronized MF pulse during the off time of the HiPIMS period. This application works like a master/slave configuration.

The HiPIMS generator will be the master and triggers the slave with the synchronized MF pulse signal.

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Advantages

  • High deposition rate
  • Preventing of arcing and poising
  • Stabilization of processes
  • New process option

HiPIMS + MF

Example Applications

  • Large area coating on glas
  • Sensor coating