GS – Type: 0,5kW – 3kW

The compact power supplies were developed for magnetrons in production plants and laboratories. Easy and safe operation makes these power supplies very flexible for many processes. The arc-handling adjusts automatically to different process parameters, so that programming is not necessary. The units are designed for the mounting in 19″-racks.

All models features

  • Automatic Arc Handling
  • Manual operation via frontpane
  • Analog Interface (AS4)
  • Serial Interface RS232/RS485
  • Air cooled
  • ½ 19″–case, 3 HU

 

Type DC Power DC Voltage DC Current
05/1000 0,5kW 1000V 0,7A
10/1000 1kW 1000V 1,4A
15/1000 1,5kW 1000V 2,4A
20/1000 2kW 1000V 2,8A
30/1000 3kW 1000V 4,2A

GX – Type: 5kW – 15kW

GX-Sputtering Power Supplies are able to eliminate up to 80.000 Arcs per second automatically. This extreme capability combined with the small size of the power supply is outstanding and significant for the series GX, which also has an integrated cathode clamp diode. The power supplies can be operated with full nominal power without limitation of the duty cycle.

All models features

  • Automatic Arc Handling
  • Internal Close Loop for U,I,P
  • Analog Interface (AS6)
  • Serial Interface RS232/RS485
  • Water cooling
  • Display of actual value for U,I or P
  • ½ 19″–case, 3 HU
Type DC Power DC Voltage DC Current
50/1000 5kW 1000V 10A
80/1000 8kW 1000V 16A
100/1000 10kW 1000V 20A
150/1000 15kW 1000V 30A

HX – Type: 15kW – 30kW

The very compact design of ½ 19” width and 5 HU is especially designed for production plants without cabinets. The HX has mounting flanges and can be integrated into or attached to the plasma chamber in any position. The display can be swivelled and separated from the power supply. An efficient water cooling ensures highest reliability even in non-air-conditioned rooms. In order to avoid condensation water an external magnetic valve can be connected via the integrated temperature control. The output power can be increased up to 240kW in parallel operation. The special electronic design allows master-slave-operation as well as parallel operation via Interface-Combiner or Profibus. The extreme fast Arc-Handling works completely automatic, so that no parameters have to be set.

All models features

  • Automatic Arc Handling
  • Internal Close Loop for U,I,P
  • Analog Interface (AS6)
  • Serial Interface RS232/RS485
  • Water cooling
  • ½ 19”- case, 5 HU
Type DC (kW) DC Current
150/1000 15 kW 25 A
200/1000 20 kW 35 A
250/1000 25 kW 40 A
300/1000 30 kW 50 A